Comparison of Bi₂O₃-targets produced by thermal evaporation and RF magnetron sputtering

For the nuclear chemistry and for physics of heavy elements, bismuth is one key target materials, as it heaviest stable element. As discussed earlier, compound targets were developed to withstand higher intensive ion beams. In past, Bi 2 O 3 was evaporated from tantalum crucible deposited on carbon backings. melting temperature high (817° C), process at limit cooling features evaporation set-up. Therefore, we decided test RF magnetron sputtering an alternative production method. We will present results different behavior produced via processes.